Low Pressure Silicon Pressure Sensor Die - P1302 | NovaSensor
The NovaSensor P1302 Low Pressure Silicon Pressure Sensor Die is a high-sensitivity silicon piezoresistive pressure sensor die that is well-suited for measuring low-pressure. In addition to superior stability from our patented SenStable® process, the P1302incorporates a bonded glass pedestal to provide thermal and die attach stress isolation.
The P1302 piezoresistive pressure sensors are offered in a miniature 0.11 in x 0.13 in (2.7 mm x 3.2 mm) die. When excited with 1.5 mA, the P1302 produces a millivolt output that is proportional to input pressure. The P1302 is available as a differential and gage sensor.
FEATURES AND BENEFITS
* High reliability, solid state silicon pressure sensors
* Available in differential version
* Standard pressure ranges: 10 in H2O (2.5 kPa), 1 psi (7 kPa)
* Nonlinearity < 0.25% FSO
* 5X overpressure limit